ZYGO ZMI-4004 8020-0500-01 PCB Card
Delivery time 3 days
Product origin New/used
Email plcru@foxmail.com
Mobile/wechat /WhatsApp +86 18185397189
Product Overview:Product model: ZYGO ZMI-4004, component number 8020-0500-01, be
Product Overview:
Product model: ZYGO ZMI-4004, component number 8020-0500-01, belongs to the 4-axis VME64x measuring plate.
Application scenario: It is a backup measurement plate in the Nikon 4S019-765 NSR FX-601F step repeat FPD lithography system, playing a role in the displacement measurement interferometer solution, and can help the next generation of lithography tools significantly improve the overlay accuracy and production capacity.
Performance parameters:
Resolution: 0.15nm.
Speed: 2.55m/sec.
Number of axes: 4 axes per plate.
Data rate: 10MHz.
Connection method: ST optical fiber and HSSDC electrical connection are adopted.
Other information:
Input power: 21V.
Output power: 210VDC.
Additional flash memory for communication: 120KB.
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