BROOKS AUTOMATION 001-4130-03 VCE CONTROLLER
Delivery time 3 days
Product origin New/used
Email plcru@foxmail.com
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I. Basic InformationThis is a Brooks VCE series controller (part number 001-4130
I. Basic Information
This is a Brooks VCE series controller (part number 001-4130-03), originally manufactured in the USA. The original manufacturer has discontinued this product; it is a spare part salvaged from semiconductor equipment. It is designed for use with the Marathon Express vacuum wafer transfer machine's VCE Loadlock wafer cassette lifting mechanism. It specifically controls the lifting and lowering of the wafer cassette within the vacuum chamber, along with wafer pre-alignment servo motion. It is a standard accessory for 200mm wafer transfer machines.
The entire unit features an aluminum alloy heat sink housing and weighs approximately 2.05kg. Manufactured by MA (Marathon Express) in the USA.
II. Functions and Applications
* Drives the servo motors inside the VCE vacuum cassette, completing wafer cassette lifting and slot alignment.
* Integrates wafer pre-alignment (Wafer Aligner) closed-loop control, providing high-precision edge finding and centering across X/Y/θ axes.
* Interacts with a vacuum robot controller, enabling uninterrupted loading and unloading of wafers from atmospheric to high-vacuum chambers without disrupting the chamber's vacuum environment.
III. Hardware Interface Configuration
Front Side: DB9 RS232 debugging serial port, multi-pin servo drive cable connector, power input terminal;
Side Side: Multiple DB type encoder interfaces, I/O terminals, external sensor cable connector;
Communication: RS232, GPIB, Ethernet, for interface with host computer/device main control PLC.
IV. Electrical and Environmental Parameters
Power Supply: AC 100~240V wide-range input 50/60Hz;
Operating Temperature: +10℃~+45℃ (semiconductor cleanroom conditions), storage -20~+70℃;
Humidity: 5%~85% RH non-condensing, suitable for cleanroom environments;
Positioning Indicators: Wafer repeatability ≤±0.5μm, single-cell lifting and alignment time <1s.
V. Software and Control Specifications
Built-in Brooks dedicated motion firmware, supporting incremental/sine/cosine/absolute encoder input;
Can independently control up to 3-axis servos, supporting point-to-point, origin search, and centering/edge-finding motion logic;
Compatible with SEMI semiconductor device communication protocols, related models: 001-4130-01/001-4130-09 (differences in number of axes/firmware version).
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